2014 Goldberg Actinic Mask Imaging SHARP EUV Microscope
<p>Nov 11, 2014 07:02 PM</p>
<p>
note: this is Ken A. Goldberg at CAL (NOT the Ken Goldberg who does AI/ robotics also at Cal.)</p>
<p>
syn chrtron EUV scope dedicated to photomask resch. In oper > June 2013
exposure time 5 to 8 sec. can emulte current and future EUV litho.</p>
<p>
SHARP is the successor to the AIT.
all EUV actinic illumination and imaging.</p>