2012 Nov EUV QA ASML
<p>Feb 02, 2013 01:33 AM
 
How will EUV be introduced into volume chip produc.
 
will be used for most difficult of the critical layers first...
then, when productivity incr, additional layers will be converted to EUV.
 
so EUV and immersion will co-exist.
 
they have 11 orders for  NXE-3300B  as of  Nov 15 2012.</p>