Cymer ASML
<p>Jan 01, 2013 11:57 AM
 
see video on pre-puse  tech for EUV litho by  ? Dan Brown tech lead in San Diego...
 
30 micron droplets...  100 mph thru laser beam;
obliterated  >  500K Celsius plasma.
 
pretty efficient....
 
wasted laser power  goes around the droplet
 
pre-pulse;  distorts into plate shape target... better shaped, larger diameter...
 
turn it into a little sun.
 
 </p>