2014 Nov EUV Source Workshop Summary Bakshi
<p>Nov 30, 2014 05:54 PM</p>
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lots of good news!</p>
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largest gathering of EUV source experts.</p>
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2015: sustained power > 100 watts;</p>
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FEL serious viewed as EUV source for > 1000 W power.</p>
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FEL Update: ready in 5 to 7 years.</p>
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key group: is Eiji Kako of High Energy Accel Resch Org in Japan.</p>
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