Source problems cause EUV revenue delay, says ASML
<p>Jan 01, 2013 11:58 AM
 
article from april 19 2012:
 
first qtr 2012 ASML CFO call;
begun work on 11 of EUV litho machines.
 
deliver 2 in 2012; ret in H1 2013;
have run 9,000 wafers on them at var sites around the world (r and d)
 
 
 
operatge at 30 to 50 watts at high duty cycles
 
only need 100 watts to get 60 wafers per hous.
 
 
 
 </p>